Specifications

		KGM 181	KGM 182	KGM 281	KGM 282
Measuring standard Coefficient of linear expansion		Two-coordinate TITANID phase grating αtherm 8 x 10–6 K–1
Accuracy grade		±2 µm		±1 µm
Measuring range		⌀ 140 mm	⌀ 230 mm	⌀ 140 mm	⌀ 230 mm
Incremental signals		1 VPP
Signal period		4 µm in measuring directions I and II
Measuring step		≥ 0.001 µm (with EIB 74x)
Voltage supply		5 V ±0.25 V/< 100 mA (per axis)
Mount for scanning head		⌀ 20h7
Traversing speed		≤ 80 m/min		≤ 72 m/min
Mass	Grid plate Scanning head	≈ 4.0 kg ≈ 0.6 kg	≈ 3.1 kg ≈ 0.6 kg	≈ 2.3 kg ≈ 0.6 kg	≈ 4.9 kg ≈ 0.6 kg

KGM