Dati tecnici
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KGM 181 |
KGM 182 |
KGM 281 |
KGM 282 |
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Measuring standard Coefficient of linear expansion |
Two-coordinate TITANID phase grating αtherm 8 x 10–6 K–1 |
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Accuracy grade |
±2 µm |
±1 µm |
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Measuring range |
¬ 140 mm |
¬ 230 mm |
¬ 140 mm |
¬ 230 mm |
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Incremental signals |
1 VPP |
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Signal period |
4 µm in measuring directions I and II |
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Measuring step |
≥ 0.001 µm (with EIB 74x) |
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Voltage supply |
5 V ±0.25 V/< 100 mA (per axis) |
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Mount for scanning head |
¬ 20h7 |
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Traversing speed |
≤ 80 m/min |
≤ 72 m/min |
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Mass |
Grid plate Scanning head |
≈ 4.0 kg ≈ 0.6 kg |
≈ 3.1 kg ≈ 0.6 kg |
≈ 2.3 kg ≈ 0.6 kg |
≈ 4.9 kg ≈ 0.6 kg |